Validated Parameter Estimation for Static Nonlinear Systems with Applications to Micro Systems
M. Gennat (University of Wuppertal, Germany) and B. Tibken (University of Wuppertal, Germany)
Parameter estimation determines unknown parameters for a model with given measurements. Validated parameter estimation takes into account all measurement errors. Thus, a domain of parameters is computed, which corresponds to the model, the model uncertainties, the measurements, and the measurement errors. This validated parameter estimation is used do determine geometrical and mechanical parameters of a Micro-Electro-Mechanical System. A model representing eigenfrequencies of the micro system is used in conjunction with empirically measured frequencies of the system with known error bounds. The model and the corresponding measurements demand for validated parameter estimation. To determine the parameters a new approach is used.