Simple simulation models for semiconductor wafer fabrication facilities
O. Rose (Dresden University of Technology, Germany)
Semiconductor wafer fabrication facilities (wafer fabs) are among the most complex production facilities. A large product variety, hundreds of processing steps per product, hundreds of machines of different types, and automated transport lead to a system complexity which is hard to understand and hard to handle. For educating planners and developing adequate material flow control mechanisms, simple models for this complex environment are required. We present new modelling approaches which lead to rather accurate cycletime-over-utilization curves and provide good cycle time distribution estimates for semiconductor fabs.